Transmission Coefficient Estimation for High-κ Gate Stack Evaluation
نویسندگان
چکیده
We investigate methods to estimate the transmission coefficient of high-κ gate stacks. Based on the commonly used Tsu-Esaki model, we approximate the WKB and Gundlach methods to be feasible for device simulators. Comparisons with a rigorous solution using the transfer-matrix method show good qualitative agreement. We further use the models to analyze the trade-off between barrier height and permittivity in different high-κ dielectrics and identify ZrO2, Al2O3 and possibly Ta2O5 as the materials with appropriate gate current blocking ability. Key-Words: Device simulation, high-k dielectrics, tunneling current, gate stack.
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تاریخ انتشار 2002